Electro polished stainless steel cylinders and adapters for ALD Precursors
They do exhibit good thermal stability and are storable for extended periods of time if well packed. For the CVD/ALD process, precursors are mostly used directly from the package they are supplied in order to avoid their handling issues. For this reason, the package must be considered as a component of the product.
Generally bubblers with internal dip tubes are utilized as a packaging option for liquids, while stainless steel cylinders with the suitable seals and fittings are utilized for gases. Normally the transfer of liquid precursors into the reaction chamber is performed by bubbling a carrier gas via the container where they are stored at or less than room temperature.
There are several cylinder options to choose from with volumes ranging from 50ml to 200ml. We offer a variety of configurations to meet your ALD equipment needs. Valve type options include ball valves rated up to 300°F or bellows valves rated up to 600°F. We also offer high purity and ultra-high purity diaphragm valves rated up to 302°F.
We continue not only to provide a wide variety of high purity precursors and several cylinder options, but we also strive to build ongoing relationships with our customers by offering fast refilling and cleaning services in the UK and Ireland
Please visit the links below for related products and a list of CVD/ALD precursors pre-packaged into cylinders:Cylinders, Bubblers & Other Equipment